Ieee Transactions On Semiconductor Manufacturing

Development of Novel Solar Cell Micro Crack Detection Technique

Real-Time Measurement of Exact Size and Refractive Index of Particles in Liquid by Flow Particle Tracking Method

A CNN-Based Transfer Learning Method for Defect Classification in Semiconductor Manufacturing

An Integrated Approach for IC Design R&D Portfolio Decision and Project Scheduling and a Case Study

An Online Virtual Metrology Model With Sample Selection for the Tracking of Dynamic Manufacturing Processes With Slow Drift

Wafer Defect Pattern Recognition and Analysis Based on Convolutional Neural Network

Effect of Large Particles During Chemical Mechanical Polishing Based on Numerical Modeling of Abrasive Particle Trajectories and Material Removal Non-Uniformity

An Improved GMM-Based Algorithm With Optima Multi-Color Subspaces for Color Difference Classification of Solar Cells

Practical Routing Algorithm Using a Congestion Monitoring System in Semiconductor Manufacturing

Wafer Level Variability Improvement by Spatial Source/Drain Activation and Ion Implantation Super Scan for FinFET Technology